A one-body MEMS device composed of mutually insulated metallic parts-fabrication processes for a microactuator for high-density hard disk drives

Author

Nakamura, S. ; Suzuki, K. ; Fujita, H. ; Numazawa, T. ; Takada, H.

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

1998

fDate

25-29 Jan 1998

Firstpage

278

Lastpage

283

Abstract

Micromachining processes are developed to fabricate a high-aspect-ratio-microstructure (HARMS) actuator for head positioning system of Hard Disk Drives (HDDs) to increase the recording density of HDDs. The actuator is driven by electrostatic force and it has multiple parallel plate electrodes. Our process is to fabricate high-aspect-ratio gap using electroplated sacrificial layer. The process is very attractive to increase the generating force of the electrostatic actuator. Another process is to fabricate a one-body MEMS device composed of mutually insulated metallic parts. These process are essential to realize a compact MEMS device such as a piggy-back microactuator of HDDs

Keywords

electroforming; electroplated coatings; hard discs; microactuators; micromachining; position control; semiconductor technology; HDD; MEMS device; Si; compact MEMS device; electroplated sacrificial layer; electrostatic actuator; electrostatic force; fabrication; generating force; head positioning; high-aspect-ratio-microstructure actuator; high-density hard disk drives; insulated metallic parts; microactuator; micromachining; multiple parallel plate electrodes; one-body MEMS device; piggy-back microactuator; recording density; Dielectrics and electrical insulation; Electrodes; Electrostatic actuators; Fabrication; Hard disks; Insulation life; Microactuators; Microelectromechanical devices; Servomechanisms; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659768

Filename

659768