Title :
3D finite element modeling of real size SAW devices and experimental validation
Author :
Zhgoon, S. ; Tsimbal, D. ; Shvetsov, A. ; Bhattacharjee, K.
Author_Institution :
Dept. of Radio Eng. Fundamentals, Moscow Power Eng. Inst., Moscow
Abstract :
We report on several successful examples of using finite elements based software package for modeling SAW structures with dimensions above 100 wavelengths in the propagation direction including all the electrodes and spaces. The approach easily incorporates additional layers and elements with arbitrary 3D shapes that are common in SAW devices. Temperature behavior of the frequency response, SAW beam shape, bulk wave related data and other relevant information is stored in the solution and this helps determining the sources of response peculiarities. The modeling results for infinite periodic structures are validated against the proven FEMSDA software. Personal workstation is used for modeling. This work demonstrates the capabilities of finite elements based software running on contemporary personal computers to solve practical problems of SAW device design.
Keywords :
finite element analysis; frequency response; periodic structures; surface acoustic wave devices; thermal analysis; 3D finite element modeling; 3D shape; FEMSDA software; SAW beam shape; SAW device design; SAW structure modeling; finite element based software package; frequency response; infinite periodic structure; temperature behavior; Electrodes; Finite element methods; Frequency response; Periodic structures; Shape; Software packages; Surface acoustic wave devices; Surface acoustic waves; Temperature; Workstations; 3D modeling; SAW device; Surface acoustic wave; finite elements; periodic structures;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0476
