• DocumentCode
    3017872
  • Title

    Energy reversible switching from amorphous metal based nanoelectromechanical switch

  • Author

    Mayet, Abdulilah ; Smith, Christopher E. ; Hussain, M.M.

  • Author_Institution
    Integrated Nanotechnol. Lab., King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia
  • fYear
    2013
  • fDate
    5-8 Aug. 2013
  • Firstpage
    366
  • Lastpage
    369
  • Abstract
    We report observation of energy reversible switching from amorphous metal based nanoelectromechanical (NEM) switch. For ultra-low power electronics, NEM switches can be used as a complementary switching element in many nanoelectronic system applications. Its inherent zero power consumption because of mechanical detachment is an attractive feature. However, its operating voltage needs to be in the realm of 1 volt or lower. Appropriate design and lower Young´s modulus can contribute achieving lower operating voltage. Therefore, we have developed amorphous metal with low Young´s modulus and in this paper reporting the energy reversible switching from a laterally actuated double electrode NEM switch.
  • Keywords
    Young´s modulus; low-power electronics; microswitches; nanoelectromechanical devices; nanoelectronics; NEM switches; Young´s modulus; amorphous metal; complementary switching element; double electrode; energy reversible switching; mechanical detachment; nanoelectromechanical switch; nanoelectronic system; ultra-low power electronics; Films; Logic gates; Silicon; Switches; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
  • Conference_Location
    Beijing
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4799-0675-8
  • Type

    conf

  • DOI
    10.1109/NANO.2013.6720965
  • Filename
    6720965