DocumentCode :
3017872
Title :
Energy reversible switching from amorphous metal based nanoelectromechanical switch
Author :
Mayet, Abdulilah ; Smith, Christopher E. ; Hussain, M.M.
Author_Institution :
Integrated Nanotechnol. Lab., King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia
fYear :
2013
fDate :
5-8 Aug. 2013
Firstpage :
366
Lastpage :
369
Abstract :
We report observation of energy reversible switching from amorphous metal based nanoelectromechanical (NEM) switch. For ultra-low power electronics, NEM switches can be used as a complementary switching element in many nanoelectronic system applications. Its inherent zero power consumption because of mechanical detachment is an attractive feature. However, its operating voltage needs to be in the realm of 1 volt or lower. Appropriate design and lower Young´s modulus can contribute achieving lower operating voltage. Therefore, we have developed amorphous metal with low Young´s modulus and in this paper reporting the energy reversible switching from a laterally actuated double electrode NEM switch.
Keywords :
Young´s modulus; low-power electronics; microswitches; nanoelectromechanical devices; nanoelectronics; NEM switches; Young´s modulus; amorphous metal; complementary switching element; double electrode; energy reversible switching; mechanical detachment; nanoelectromechanical switch; nanoelectronic system; ultra-low power electronics; Films; Logic gates; Silicon; Switches; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
ISSN :
1944-9399
Print_ISBN :
978-1-4799-0675-8
Type :
conf
DOI :
10.1109/NANO.2013.6720965
Filename :
6720965
Link To Document :
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