DocumentCode
3017872
Title
Energy reversible switching from amorphous metal based nanoelectromechanical switch
Author
Mayet, Abdulilah ; Smith, Christopher E. ; Hussain, M.M.
Author_Institution
Integrated Nanotechnol. Lab., King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia
fYear
2013
fDate
5-8 Aug. 2013
Firstpage
366
Lastpage
369
Abstract
We report observation of energy reversible switching from amorphous metal based nanoelectromechanical (NEM) switch. For ultra-low power electronics, NEM switches can be used as a complementary switching element in many nanoelectronic system applications. Its inherent zero power consumption because of mechanical detachment is an attractive feature. However, its operating voltage needs to be in the realm of 1 volt or lower. Appropriate design and lower Young´s modulus can contribute achieving lower operating voltage. Therefore, we have developed amorphous metal with low Young´s modulus and in this paper reporting the energy reversible switching from a laterally actuated double electrode NEM switch.
Keywords
Young´s modulus; low-power electronics; microswitches; nanoelectromechanical devices; nanoelectronics; NEM switches; Young´s modulus; amorphous metal; complementary switching element; double electrode; energy reversible switching; mechanical detachment; nanoelectromechanical switch; nanoelectronic system; ultra-low power electronics; Films; Logic gates; Silicon; Switches; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location
Beijing
ISSN
1944-9399
Print_ISBN
978-1-4799-0675-8
Type
conf
DOI
10.1109/NANO.2013.6720965
Filename
6720965
Link To Document