Title :
Acoustic waves in LiNbO3/SiO2/water/silicon rubber structures
Author :
Darinskii, A.N. ; Weihnacht, M. ; Schmidt, H.
Author_Institution :
Inst. of Crystallogr., Russian Acad. Sci., Moscow
Abstract :
This paper studies acoustic waves in a water layer enclosed between the YZ-LiNbO3 substrate coated with a thin SiO2 layer and the half-infinite domain occupied by silicone rubber. The plane wave spectrum is computed. Numerical estimations are made of the COM-parameters describing a periodic grating deposited on the LiNbO3 substrate under the SiO2 layer. The dependence of the COM-parameters is investigated on characteristics and conditions specifying the structure.
Keywords :
acoustic streaming; acoustic wave propagation; lithium compounds; silicone rubber; surface acoustic waves; COM-parameters; LiNbO3-H2O-SiO2; SAW propagation; acoustic streaming; half-infinite domain; numerical estimation; periodic grating deposition; plane wave spectrum; silicone rubber; surface acoustic wave propagation; water layer; Acoustic waves; Crystallography; Electrodes; Gratings; Microfluidics; Permittivity; Pumps; Rubber; Silicon; Surface acoustic waves; anisotropy; microfluidics; piezoelectricuty; surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0340
