Title :
The MSM diamond device for direct and indirect X-ray detection
Author :
Cheirsirikul, S. ; Jesen, S. ; Hruanun, C.
Author_Institution :
Fac. of Eng., King Mongkut´s Inst. of Technol. Ladkrabang, Bangkok, Thailand
Abstract :
Development synthesizing diamond film on silicon substrate was processed by Hot Filament Chemical Vapor Deposition (HFCVD). The gas processes using of H2 and CH4 to produce intrinsic diamond and MSM device constructed on the diaphragm of diamond film. Schottky junctions on the top and the lower diaphragm were produced by aluminum metal. After that, the result of detecting a direct and indirect X-ray of MSM diamond was satisfactory because it could respond along with increasing of X-ray intensity. The X-ray expose time of indirect expose by BaF2 scintillator faster more than direct expose.
Keywords :
Schottky effect; X-ray detection; chemical vapour deposition; diamond; diaphragms; scintillation; scintillation counters; thin film sensors; C; HFCVD; MSM diamond film device; Schottky junction; X-ray detection; X-ray intensity; aluminum metal; diaphragm; gas processing; hot filament chemical vapor deposition; scintillator; silicon substrate; Crystals; Diamonds; Films; Photoconductivity; Photonics; Silicon; X-ray detection; Diamond-film fabrication; Indirect X-ray detection; MSM diamond; direct X-ray detection;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147446
