Low-cost and ultra-sensitive poly-Si nanowire biosensor for Hepatitis B Virus (HBV) DNA detection

Based on the improvements of the fabrication technologies, the dimension of the device has decreased to tens of nanometer. This scale approaches to most bio-molecules, such as DNAs and proteins. Therefore, the nano-scale device has become an important connection between semiconductor technologies and biomedical applications. However, few of previous studies consider the feasibility to integrate standard CMOS chip with biomolecular detections. In this work, we demonstrated a Hepatitis B Virus (HBV) DNA detection sensor with CMOS-compatible poly-silicon nanowire devices. The developed biosensor shows the detection limit with 100fM and the capability to distinguish 1 base-pair mismatched DNA. In addition, the design concept of this biosensor has been implemented in DNA biomolecular detection SoC by a commercialized 0.35μm TSMC process. This work demonstrated the potential of CMOS technologies in biomedical applications.