Thermoreflectance imaging of superlattice micro refrigerators

Author

Christofferson, James ; Vashaee, Daryoosh ; Shakouri, Ali ; Melese, Philip ; Fan, Xiaofeng ; Zeng, Gehong ; LaBounty, Chris ; Bowers, John E. ; Croke, Edward T., III

Author_Institution

Jack Baskin Sch. of Eng., California Univ., Santa Cruz, CA, USA

fYear

2001

fDate

2001

Firstpage

58

Lastpage

62

Abstract

High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50 mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integrated circuit, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental set-up, we expect to obtain thermal images with sub-micron spatial resolution

Keywords

cooling; failure analysis; infrared imaging; integrated circuit packaging; integrated circuit reliability; integrated circuit testing; refrigeration; semiconductor superlattices; temperature control; thermal management (packaging); thermoreflectance; fabrication failures; high dynamic range PIN array camera; integrated circuit application; optimization; semiconductor micro refrigerators; spatial resolution; superlattice micro refrigerators; temperature resolution; thermal image resolution; thermal images; thermoreflectance imaging; thermoreflectance method; Filtering; Frequency; Image resolution; Optical reflection; Refrigerators; Spatial resolution; Superlattices; Temperature control; Temperature dependence; Thermoreflectance imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Thermal Measurement and Management, 2001. Seventeenth Annual IEEE Symposium

Conference_Location

San Jose, CA

Print_ISBN

0-7803-6649-2

Type

conf

DOI

10.1109/STHERM.2001.915145

Filename

915145