Title :
Thermoreflectance imaging of superlattice micro refrigerators
Author :
Christofferson, James ; Vashaee, Daryoosh ; Shakouri, Ali ; Melese, Philip ; Fan, Xiaofeng ; Zeng, Gehong ; LaBounty, Chris ; Bowers, John E. ; Croke, Edward T., III
Author_Institution :
Jack Baskin Sch. of Eng., California Univ., Santa Cruz, CA, USA
Abstract :
High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50 mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integrated circuit, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental set-up, we expect to obtain thermal images with sub-micron spatial resolution
Keywords :
cooling; failure analysis; infrared imaging; integrated circuit packaging; integrated circuit reliability; integrated circuit testing; refrigeration; semiconductor superlattices; temperature control; thermal management (packaging); thermoreflectance; fabrication failures; high dynamic range PIN array camera; integrated circuit application; optimization; semiconductor micro refrigerators; spatial resolution; superlattice micro refrigerators; temperature resolution; thermal image resolution; thermal images; thermoreflectance imaging; thermoreflectance method; Filtering; Frequency; Image resolution; Optical reflection; Refrigerators; Spatial resolution; Superlattices; Temperature control; Temperature dependence; Thermoreflectance imaging;
Conference_Titel :
Semiconductor Thermal Measurement and Management, 2001. Seventeenth Annual IEEE Symposium
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6649-2
DOI :
10.1109/STHERM.2001.915145
