A hands-on laboratory for teaching microfabrication

Author

Marti, Joan ; Sibakoti, Mandip ; Jalali, Mohammad ; Campbell, Stephen A.

Author_Institution

Nanofabrication Center, Univ. of Minnesota, Minneapolis, MN, USA

fYear

2013

fDate

5-8 Aug. 2013

Firstpage

1022

Lastpage

1025

Abstract

A set of laboratory activities has been developed to simulate multiple steps in the integrated circuit fabrication process. The Microfabrication Teaching Laboratory offers tools and procedures for a comprehensive simulation of the device fabrication process, with the goal of producing working devices such as a p-n diode, a solar cell and a MOSFET on a silicon wafer substrate. The lab includes activities aimed at wafer oxidation, patterning the oxide layer via optical lithography, etching, selective doping to achieve a p-n junction, and device characterization. Portions of the laboratory have been tested in undergraduate teaching labs with successful results.

Keywords

engineering education; etching; integrated circuit manufacture; integrated circuit technology; laboratories; microfabrication; photolithography; semiconductor doping; semiconductor industry; teaching; device fabrication process; etching process; hands-on laboratory; integrated circuit fabrication process; laboratory activity; microfabrication teaching laboratory; oxide layer via optical lithography; patterning process; selective doping; wafer oxidation; Educational institutions; Fabrication; Laboratories; Lithography; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on

Conference_Location

Beijing

ISSN

1944-9399

Print_ISBN

978-1-4799-0675-8

Type

conf

DOI

10.1109/NANO.2013.6721011

Filename

6721011