Title :
Fabrication of large-scale suspended graphene clamp-clamp beam by FIB cutting
Author :
Shibin Zhang ; Xia Wan ; Yang Xu ; Jing Chen
Author_Institution :
Nat. Key Lab. on Micro/Nano Fabrication Technol., Peking Univ., Beijing, China
Abstract :
In this study, suspended graphene clamp-clamp beam (SGCCB) as long as 100 μm was manufactured by FIB cutting. Large-scale graphene film was grown on Cu foil by CVD and transferred to DRIE defined silicon substrate. The influence of FIB cutting time and ion beam intensity on the pattern profile were investigated with an optimized processing recipe. The SGCCBs revealed a sharp edge, which can be used for gas molecule sensors, resonator and many other fields.
Keywords :
chemical vapour deposition; clamps; cutting; focused ion beam technology; graphene; thin films; C; CVD; Cu foils; DRIE defined silicon substrate; FIB cutting time; SGCCB; Si; gas molecule sensors; ion beam intensity; large-scale graphene film growth; large-scale suspended graphene clamp-clamp beam fabrication; pattern profile; resonators; sharp edge; Etching; Fabrication; Films; Graphene; Ion beams; Silicon; Substrates; FIB; SGCCB; graphene; suspended;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6721019
