• DocumentCode
    3019374
  • Title

    Panel: MEMS CAD beyond multi-million transistors

  • Author

    Pister, Kris ; Inoue, Takeru

  • Author_Institution
    University of California
  • fYear
    1999
  • fDate
    21-25 June 1999
  • Firstpage
    535
  • Lastpage
    536
  • Keywords
    Consumer electronics; Design automation; Fabrication; Marketing and sales; Micromechanical devices; Sensor phenomena and characterization; Sensor systems; Textile industry; Transistors; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation Conference, 1999. Proceedings. 36th
  • Conference_Location
    New Orleans, LA, USA
  • Print_ISBN
    1-58113-092-9
  • Type

    conf

  • DOI
    10.1109/DAC.1999.781373
  • Filename
    781373