An electromagnetically-driven MEMS micromirror for laser projection

MEMS micromirror has a wide range of applications, such as laser projection, optical communication, lighting detection and ranging medical imaging detection. In this paper, an electromagnetically-driven biaxial scanning micromirror for laser projection is designed and fabricated which has large deflection angle and linear mechanical properties. Finite Element Method (FEM) is used to design and optimize its mechanical structure parameters. Test results indicate that the mechanical deflection angle of slow scan axis and fast scan axis are ±7.5° and ±12.5° respectively,the angular resolution is better than 2 μrad. According to the measured amplitude-frequency characteristic curve, the resonant frequency of fast scan axis is about 14395Hz and its quality factor Q is 1300. Four-terminal piezoresistive sensors are integrated on the fast and slow axes,the sensitivity of the sensors is 2.6 mV/V@1deg. Finally, the laser projection based on raster scanning of the micromirror is demonstrated and SVGA image resolution is achieved.