• DocumentCode
    3019776
  • Title

    A theoretical model of a new electrostatic transducer incorporating fluidic amplification

  • Author

    Walker, Alan J. ; Mulholland, Anthony J. ; Campbell, Ewan ; Hayward, Gordon

  • Author_Institution
    Dept. of Math., Univ. of Strathclyde, Glasgow
  • fYear
    2008
  • fDate
    2-5 Nov. 2008
  • Firstpage
    1409
  • Lastpage
    1412
  • Abstract
    This article concerns the design of a new electrostatic transducer whose backplate consists of a series of drilled pipes. A new one-dimensional model is derived which considers the interaction of the membrane with the air load, the air cavities, and the drilled pipes in the backplate. Dynamic equations for the impedance in each component of the device are calculated analytically and connected using interface conditions of continuity of pressure and radiation conditions into the air load. The model is able to produce solutions to the mechanical impedance of the device and the displacement of the membrane as a function of the device´s design parameters. Model results for the output pressure compare well with previous experimental data. The inverse problem of retrieving the design parameters for a desired output is discussed.
  • Keywords
    acoustic impedance; capacitive sensors; electrostatic devices; fluidic devices; inverse problems; ultrasonic transducers; air cavities; backplate; capacitive micromachined ultrasonic transducers; device design parameter; device mechanical impedance; drilled pipes; electrostatic transducer; fluidic amplification; impedance equation; interface condition; inverse problem; membrane displacement; membrane-air load interaction; pressure continuity; radiation condition continuity; ultrasonic transducer; Acoustic transducers; Biomembranes; Design engineering; Electrostatics; Erbium; Impedance; Mathematical model; Mathematics; Ultrasonic transducers; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2008. IUS 2008. IEEE
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-2428-3
  • Electronic_ISBN
    978-1-4244-2480-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2008.0342
  • Filename
    4803336