DocumentCode :
3019776
Title :
A theoretical model of a new electrostatic transducer incorporating fluidic amplification
Author :
Walker, Alan J. ; Mulholland, Anthony J. ; Campbell, Ewan ; Hayward, Gordon
Author_Institution :
Dept. of Math., Univ. of Strathclyde, Glasgow
fYear :
2008
fDate :
2-5 Nov. 2008
Firstpage :
1409
Lastpage :
1412
Abstract :
This article concerns the design of a new electrostatic transducer whose backplate consists of a series of drilled pipes. A new one-dimensional model is derived which considers the interaction of the membrane with the air load, the air cavities, and the drilled pipes in the backplate. Dynamic equations for the impedance in each component of the device are calculated analytically and connected using interface conditions of continuity of pressure and radiation conditions into the air load. The model is able to produce solutions to the mechanical impedance of the device and the displacement of the membrane as a function of the device´s design parameters. Model results for the output pressure compare well with previous experimental data. The inverse problem of retrieving the design parameters for a desired output is discussed.
Keywords :
acoustic impedance; capacitive sensors; electrostatic devices; fluidic devices; inverse problems; ultrasonic transducers; air cavities; backplate; capacitive micromachined ultrasonic transducers; device design parameter; device mechanical impedance; drilled pipes; electrostatic transducer; fluidic amplification; impedance equation; interface condition; inverse problem; membrane displacement; membrane-air load interaction; pressure continuity; radiation condition continuity; ultrasonic transducer; Acoustic transducers; Biomembranes; Design engineering; Electrostatics; Erbium; Impedance; Mathematical model; Mathematics; Ultrasonic transducers; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
Type :
conf
DOI :
10.1109/ULTSYM.2008.0342
Filename :
4803336
Link To Document :
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