Title :
Thin-film IR absorbers with high absorbance and easy preparation and integration
Author :
Shang, Y.F. ; Ye, X.Y. ; Wang, Z.F. ; Feng, J.Y. ; Tang, Fen ; Wang, X.H.
Author_Institution :
Tsinghua Univ., Beijing, China
Abstract :
Thin-film infrared (IR) radiation absorbers are widely used in thermal detectors, and high IR absorption in a wide spectral range is critical to improve the sensitivities of the detectors. In this work, three types of thin-film IR absorbers were prepared and the absorption characteristics were tested. 1 μm thick Styrene Butadiene Styrene block polymer (SBS) decorated multiwall carbon nanotube (MWNT) films, prepared via solution coating, indicate an average absorbance of 92% in the spectral range of 8 ~ 14 μm. 1.5 μm thick nanostructured Cr thin-films, obtained by sputtering at a high incident angle of 110°, reveal an absorbance of 55% at 8 μm which decreases linearly to 35% at 14 μm. 4 μm thick carbonized photoresist thin-films, formed by ion beam etching, imply an absorbance of 83% at 8 μm which declines monotonously to 57% at 14 μm. All the thin-film IR absorbers are easy to fabricate and integrate into thermal detectors without need of specific equipment. The SBS decorated MWNT thin-films show the highest IR absorbance and the best uniformity of spectral response in 8 ~ 14 μm, indicating that they are most suitable to be used as an IR absorber in IR detectors.
Keywords :
carbon nanotubes; filled polymers; infrared spectra; nanocomposites; nanofabrication; polymer blends; sputter deposition; thin films; C; IR absorption; absorbance; ion beam etching; multiwall carbon nanotube films; nanostructured thin-films; size 1 mum; size 1.5 mum; solution coating; sputtering; styrene butadiene styrene block polymer; thermal detectors; thin-film IR absorbers; thin-film infrared radiation absorbers; Absorption; Detectors; Films; Optical surface waves; Resists; Scattering; Substrates;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6721046