Title :
Toward 3D Microfluidic Structures Fabricated with Two-photon Laser Machining
Author :
Liu, Yihong ; Pyrak-Nolte, Laura J. ; Nolte, David
Author_Institution :
Purdue Univ., West Lafayette
Abstract :
We have developed a method to fabricate 3D microfluidic systems with two-photon polymerization in SU-8 photoresist. This approach will be an easy and accurate way to fabricate microfluidic systems simulating complex microstructures.
Keywords :
laser beam machining; microfluidics; nanotechnology; photoresists; polymerisation; two-photon processes; 3D microfluidic systems; SU-8 photoresist; porous structures; two-photon laser machining; two-photon polymerization; Bonding; Laser theory; Machining; Microchannel; Microfluidics; Microstructure; Optical device fabrication; Polymers; Resists; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453401
