Title :
Multi-functional MEMS/NEMS for nanometrology applications
Author :
Ling Hao ; Gallop, J. ; Stewart, Monique ; Lees, K. ; Jie Chen
Author_Institution :
Nat. Phys. Lab., Teddington, UK
Abstract :
As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.
Keywords :
microsensors; nanosensors; MEMS resonator; NEMS resonator; excitation methods; multifunctional MEMS; multifunctional NEMS; nanometrology applications; readout methods; Lasers; Measurement by laser beam; Microwave amplifiers; Nanoelectromechanical systems; Optical resonators; Voltage measurement;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6721047
