Title :
Thermal flow sensor for liquids and gases
Author :
Ashauer, M. ; Glosch, H. ; Hedrich, F. ; Hey, N. ; Sandmaier, H. ; Lang, W.
Author_Institution :
Inst. of Micromachining & Inf. Technol., Hahn-Schickard-Gesellschaft, Villingen-Schwenningen, Germany
Abstract :
A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is furthermore relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases
Keywords :
elemental semiconductors; flow measurement; microsensors; silicon; 2 ms; LPCVD; Si; athermotransfer; digital simulation; gases; liquids; reaction time; thermal anemometer; thermal flow sensor; thermal time of flight; Biomembranes; Fluid flow; Fluid flow measurement; Gases; Heat transfer; Isolation technology; Manufacturing; Pollution measurement; Silicon; Thermal sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659781
