Title :
Internal phase inversion narrow bandwidth MEMS filter
Author :
Yan, Jize ; Seshia, Ashwin A. ; Le Phan, Kim ; Van Beek, Joost T M
Author_Institution :
Dept. of Eng., Univ. of Cambridge, Cambridge
Abstract :
This paper reports a novel capacitively coupled twin beam resonator internal phase inversion filter fabricated in a SOI MEMS process. A narrow bandwidth of 0.0157% is demonstrated with a low control-voltage of -0.87 V. The bandwidth can be substantially reduced by utilizing an electrical coupling spring as opposed to a mechanical coupling-spring. The bandwidth is tunable with control achieved using a differential DC bias. A summary and comparison with other members of the phase inversion filter family is also included.
Keywords :
band-pass filters; microfabrication; micromechanical resonators; resonator filters; silicon-on-insulator; SOI MEMS process; Si-JkJk; capacitively coupled twin beam resonator; electrical coupling spring; internal phase inversion filter fabrication; mechanical coupling spring; narrow bandwidth MEMS filter; voltage -0.87 V; Bandwidth; Capacitance; Digital filters; Micromechanical devices; Optical coupling; Optical filters; Optical resonators; Phased arrays; Resonator filters; Voltage; MEMS; filters; narrow bandwidth; resonators;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0168
