• DocumentCode
    3020820
  • Title

    Fully etched grating couplers for atomic layer deposited horizontal slot waveguides

  • Author

    Naiini, Maziar Manouchehry ; Malm, Gunnar ; Östling, Mikael

  • Author_Institution
    Sch. of Inf. & Commun. Technol., KTH - R. Inst. of Technol., Kista, Sweden
  • fYear
    2011
  • fDate
    14-16 March 2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Compact broadband grating couplers are designed and studied utilizing Atomic Layer Deposited Horizontal Slot waveguides, with four well-known material layers as the slot. Fabrication process conditions are experimentally studied to obtain more optimized designs. With the precision of the film thickness and refractive index provided by ALD, fabrication of reproducible grating couplers is feasible. An overview of design guidelines regarding the slot size and slot material is provided by 2D Finite Element Method calculations.
  • Keywords
    atomic layer deposition; finite element analysis; waveguide couplers; 2D finite element method calculations; ALD; atomic layer deposited horizontal slot waveguides; compact broadband grating couplers; fabrication process; fully etched grating couplers; slot material; Couplers; Couplings; Gratings; Optical fiber couplers; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultimate Integration on Silicon (ULIS), 2011 12th International Conference on
  • Conference_Location
    Cork
  • Print_ISBN
    978-1-4577-0090-3
  • Electronic_ISBN
    978-1-4577-0089-7
  • Type

    conf

  • DOI
    10.1109/ULIS.2011.5758007
  • Filename
    5758007
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3020820