Title :
Fully etched grating couplers for atomic layer deposited horizontal slot waveguides
Author :
Naiini, Maziar Manouchehry ; Malm, Gunnar ; Östling, Mikael
Author_Institution :
Sch. of Inf. & Commun. Technol., KTH - R. Inst. of Technol., Kista, Sweden
Abstract :
Compact broadband grating couplers are designed and studied utilizing Atomic Layer Deposited Horizontal Slot waveguides, with four well-known material layers as the slot. Fabrication process conditions are experimentally studied to obtain more optimized designs. With the precision of the film thickness and refractive index provided by ALD, fabrication of reproducible grating couplers is feasible. An overview of design guidelines regarding the slot size and slot material is provided by 2D Finite Element Method calculations.
Keywords :
atomic layer deposition; finite element analysis; waveguide couplers; 2D finite element method calculations; ALD; atomic layer deposited horizontal slot waveguides; compact broadband grating couplers; fabrication process; fully etched grating couplers; slot material; Couplers; Couplings; Gratings; Optical fiber couplers; Silicon;
Conference_Titel :
Ultimate Integration on Silicon (ULIS), 2011 12th International Conference on
Conference_Location :
Cork
Print_ISBN :
978-1-4577-0090-3
Electronic_ISBN :
978-1-4577-0089-7
DOI :
10.1109/ULIS.2011.5758007
