Title :
Extraction of COM parameters on Pt/LGS for high temperature SAW sensor
Author :
Aubert, Thierry ; Sarry, Frédéric ; Elmazria, Omar ; Bouvot, Laurent ; Assouar, Badreddine ; Nicolay, Pascal ; Hehn, Michel
Author_Institution :
Lab. de Phys. Milieux Ionises et Applic., Nancy Univ., Nancy
Abstract :
This work is oriented on the used of effective simulation tools to design high temperature SAW sensor. Physical constants of platinum and LGS and related temperature coefficients recently determined were implemented in FEM/SDA program. Plessky´s parameters of the Pt/LGS structure were extracted for various temperatures and injected in COM software to calculate frequency response of SAW devices. A comparison between experimental and theoretical results showed good agreement up to 250degC and the requirement of a new LGS constants set.
Keywords :
finite element analysis; frequency response; gallium compounds; high-temperature techniques; lanthanum compounds; platinum; surface acoustic wave sensors; COM parameter extraction; FEM-SDA program; La3Ga5SiO14; Plessky parameter; Pt; frequency response; high temperature SAW sensor; langasite; physical constants; platinum; temperature coefficient; Acoustic sensors; Acoustic waves; Biological materials; Biosensors; Frequency response; Monitoring; Platinum; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; COM; FEM/SDA; LGS; Pt; experimental results; high temperature; theoretical results;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0197
