Title :
Screen printed thick film based pMUT arrays
Author :
Hedegaard, T. ; Pedersen, T. ; Thomsen, E.V. ; Lou-Moeller, R. ; Hansen, K. ; Zawada, T.
Author_Institution :
Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby
Abstract :
This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8 element membrane based devices dimensioned to operate in bending mode in the 1-10 MHz regime. The devices are characterized using impedance measurements as well as acoustic pulse echo measurements. The characterization showed resonance frequencies for the bending mode around 6-8 MHz.
Keywords :
bending; bioMEMS; biomedical transducers; biomedical ultrasonics; echo; electric impedance measurement; micromachining; piezoelectric transducers; thick film devices; ultrasonic transducer arrays; ultrasonic variables measurement; acoustic pulse echo measurement; bending mode; conventional silicon technology; frequency 1 MHz to 10 MHz; impedance measurement; membrane-based device; pMUT array fabrication; piezoelectric micromachined ultrasound transducer; resonance frequency; screen printed thick film; screen printing; Costs; Fabrication; Impedance measurement; Piezoelectric transducers; Printing; Silicon; Thick films; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; arrayed elements; pMUT; pulse echo; screen printed thick film PZT;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0526
