Title :
Fabrication of MEMS diaphragm transducer array based on epitaxial PZT thin film for 2-D hydrophone application
Author :
Okada, Nagaya ; Higuchi, Kazuki ; Kobayashi, Kazuto ; Ito, Mikinori ; Takabe, Masashi ; Otonari, Mikito ; Kanja, Ikuo ; Akai, Daisuke ; Sawada, Kazuaki ; Ishida, Makoto
Author_Institution :
R & D Div., Honda Electron. Co. Ltd., Toyohashi, Japan
Abstract :
A piezoelectric ultrasonic hydrophone array was fabricated using diaphragm transducer on Si substrates. A two dimensional (2-D) array of 8 times 8 elements with diaphragm transducer has been developed by XeF2 etching from the topside of Si. In this paper, we describe the fabrication process of the diaphragm transducer array. A finite-element analysis (FEA) was calculated to evaluate the resonant frequency of the diaphragm transducer. The potential for this hydrophone array is discussed.
Keywords :
diaphragms; epitaxial layers; etching; finite element analysis; hydrophones; micromechanical devices; piezoelectric thin films; piezoelectric transducers; silicon; thin film devices; ultrasonic transducer arrays; 2-D hydrophone application; FEA calculation; MEMS diaphragm transducer array fabrication; PZT; Si; XeF2; epitaxial PZT thin film; etching; finite-element analysis; piezoelectric ultrasonic hydrophone array; resonant frequency evaluation; silicon substrate; Fabrication; Micromechanical devices; Piezoelectric films; Piezoelectric transducers; Sonar equipment; Substrates; Transistors; Two dimensional displays; Ultrasonic transducer arrays; Ultrasonic transducers; γ-Al2O3; PZT; Si integrated; component; epitaxial; hydrophone array; ultrasonic sensor;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0437
