DocumentCode
3022660
Title
The Fabrication of Laser Array by Holographic Interference Lithography
Author
Chao, Chuli ; Ni, Chi-Yu ; Xuan, Rong ; Kuo, Hao-Chung
Author_Institution
Nat. Chiao Tung Univ., Hsinchu
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
We have developed a novel method to produce different grating periods in one chip and applied this in the fabrication for laser array. The result shows accurate controllability of lasing wavelength and low threshold currents.
Keywords
diffraction gratings; holographic interferometry; laser arrays; grating periods; holographic interference lithography; laser array; lasing wavelength; low threshold currents; Arrayed waveguide gratings; Fiber lasers; Holography; Interference; Lithography; Optical arrays; Optical device fabrication; Quantum well lasers; Semiconductor laser arrays; Wavelength division multiplexing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453530
Filename
4453530
Link To Document