Title :
The Fabrication of Laser Array by Holographic Interference Lithography
Author :
Chao, Chuli ; Ni, Chi-Yu ; Xuan, Rong ; Kuo, Hao-Chung
Author_Institution :
Nat. Chiao Tung Univ., Hsinchu
Abstract :
We have developed a novel method to produce different grating periods in one chip and applied this in the fabrication for laser array. The result shows accurate controllability of lasing wavelength and low threshold currents.
Keywords :
diffraction gratings; holographic interferometry; laser arrays; grating periods; holographic interference lithography; laser array; lasing wavelength; low threshold currents; Arrayed waveguide gratings; Fiber lasers; Holography; Interference; Lithography; Optical arrays; Optical device fabrication; Quantum well lasers; Semiconductor laser arrays; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453530
