Title :
Miniature one-shot valve
Author :
Guérin, L.J. ; Dubochet, O. ; Zéberli, J.F. ; Clot, Ph ; Renaud, Ph
Author_Institution :
Inst. for Microsyst., Ecole Polytech. Fed. de Lausanne, Switzerland
Abstract :
Many microvalves have already been designed and developed. Two types can be found: passive check valves and active valves. However, for some applications, it is needed to open a flow channel only once in order, for example, to trigger a mixing reaction on a micro-bioreactor or to deliver drug sample in smart micropills. In this paper, a new simple one-shot microvalve for single-use applications is described
Keywords :
biocontrol; laser ablation; laser beam machining; membranes; microactuators; micromachining; numerical analysis; polymer films; resistors; spark machining; temperature distribution; valves; active valves; drug delivery; drug sample; electrochemical discharge micromachining; excimer laser ablation; flow channel; glass substrate; heating resistor; membrane; micro-bioreactor; microbioreactor; microvalves; miniature one-shot valve; mixing reaction; one-shot microvalve; passive check valves; single-use applications; smart micropills; Biomembranes; Coils; Drugs; Heating; Micromachining; Microvalves; Positron emission tomography; Resistors; Substrates; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659794
