Title :
A new device for multifunctional dosage of liquids by a free jet
Author :
Hey, N. ; Freygang, M. ; Gruhler, H. ; Sandmaier, H. ; Zengerle, R.
Author_Institution :
Inst. of Micromachining & Inf. Technol., Hahn-Schickard-Gesellschaft, Villingen-Schwenningen, Germany
Abstract :
A new multifunctional device is presented for the first time dosing liquids of high precision in the range of a few picoliter up to 230 nanoliter by a single free liquid jet. In contrast to the working principle of ink jet heads the device is comprising two operating modes, the novel high dynamic volume ejection for nanoliter dosage, named LiquiJet-Mode, in addition to the acoustic wave technique of ink jet heads used for picoliter dosage (LiquiDrop-Mode). The device has been realized and successfully tested with liquids in the viscosity range from 1 mPas to 80 mPas
Keywords :
elemental semiconductors; jets; membranes; microactuators; nozzles; piezoelectric actuators; silicon; valves; LiquiDrop-Mode; LiquiJet-Mode; Si; acoustic wave technique; free jet; high dynamic volume ejection; ink jet heads; liquids; multifunctional dosage; nanoliter dosage; single free liquid jet; viscosity; Acoustic sensors; Acoustic waves; Biomembranes; Fluid dynamics; Ink; Liquids; Microchannel; Nanoscale devices; Orifices; Viscosity;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659795
