DocumentCode
3024018
Title
Detection of Gold in the Facet of a Failed Semiconductor Laser Diode
Author
Chaney, J.A. ; Yeoh, T.S. ; Ives, N.A. ; Leung, M.S. ; Feinberg, Z.D. ; Ho, J.G.
Author_Institution
Aerosp. Corp., El Segundo
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
The damaged region of a failed semiconductor laser diode was analyzed using FIB nanotomography and 3D TOF-SIMS. Gold, a deep level trap, was found between the antireflective coating and the semiconductor facet.
Keywords
focused ion beam technology; nanotechnology; optical tomography; semiconductor lasers; 3D TOF-SIMS; FIB nanotomography; gold detection; semiconductor facet; semiconductor laser diode; Chemicals; Coatings; Diode lasers; Face detection; Focusing; Gold; Optical materials; Phase change materials; Semiconductor lasers; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453593
Filename
4453593
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