Title :
Deposition of Titanium dioxide (TiO2) thin films using in-house Nano-TiO2 Powder
Author :
Sahdan, Mohd Zainizan ; Alias, M.S. ; Nafarizal, N. ; Hashim, U.
Author_Institution :
Microelectron. & Nanotechnol.-Shamsuddin Res. Centre, Univ. Tun Hussein Onn Malaysia, Batu Pahat, Malaysia
Abstract :
The purpose of this study is to fabricate uniform TiO2 thin films using in-house TiO2 nanopowder. The nanopowder was obtained from a tin mining waste (Ilmenite) and its concentration was optimized during fabrication. The TiO2 thin films were characterized by an atomic force microscope (AFM), a surface profiler, an X-ray diffractometer, an Ultra violet- Visible (UV-Vis) and a current-voltage (I-V) measurement system. The relation of the uniformity and the properties of the TiO2 thin films will be discussed in detail in this paper.
Keywords :
atomic force microscopy; coating techniques; nanofabrication; nanoparticles; semiconductor thin films; titanium compounds; AFM; I-V measurement system; TiO2; UV-Vis; X-ray diffractometer; atomic force microscope; current-voltage measurement system; deposition; mining waste; nanopowder; surface profiler; thin films fabrication; ultra violet-visible; Atomic measurements; Optical device fabrication; Optical films; Optical refraction; Powders; Titanium; Titanium dioxide (TiO2); atomic force microscope (AFM); ilmenite; solgel; thin films;
Conference_Titel :
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4673-2395-6
Electronic_ISBN :
978-1-4673-2394-9
DOI :
10.1109/SMElec.2012.6417138
