DocumentCode :
3024597
Title :
Studies on the growth of alumina nanoporous film & nanowires on planar & cylindrical substrate
Author :
Tiong Teck Yaw ; Ismardi, A. ; Dee Chang Fu ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microeng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
fYear :
2012
fDate :
19-21 Sept. 2012
Firstpage :
306
Lastpage :
310
Abstract :
2D-Planar and 3D-cylindrical nanoporous anodic aluminium oxide was fabricated by anodization of high purity aluminium. High yield of alumina nanowires were prepared from planar and cylindrical nanoporous aluminium oxide film by chemical etching in H3PO4 aqueous. The tensile stress at the aluminium oxide/aluminium interface corresponds to the formation of parallel cracks on the cylindrical aluminium oxide film. A possible mechanism for the formation of alumina nanopores and nanowires on planar and cylindrical substrate was proposed.
Keywords :
alumina; anodisation; hydrogen compounds; nanoporous materials; nanowires; substrates; thin films; Al2O3; H3PO4; anodization; parallel cracks; tensile stress; Aluminum; Etching; Films; Nanowires; Substrates; Tensile stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4673-2395-6
Electronic_ISBN :
978-1-4673-2394-9
Type :
conf
DOI :
10.1109/SMElec.2012.6417147
Filename :
6417147
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3024597
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