Annular shutter mirror for a digital video disk pick-up module

Author

Bu, J.U. ; Hwang, J.D. ; Lee, J.B. ; Kim, G. ; Yang, K.Y. ; Noh, S.

Author_Institution

Device & Mater. Lab., LG Corp. Inst. of Technol, Seoul, South Korea

fYear

1998

fDate

25-29 Jan 1998

Firstpage

466

Lastpage

469

Abstract

This paper describes design and fabrication of micromachined annular shutter mirror (ASM) for use as an adjusting means of the numerical aperture (NA) in a digital video (or versatile) disk (DVD) pick-up module. The ASM was fabricated using conventional 3 masks process based on surface micromachining technology. Driven by an electrostatic force, it is clearly observed that the ASM can control effective beam spot size. The eye pattern of the readout signal of CD proved that the jitter value is 25 ns. We have demonstrated that the ASM is potentially applicable for a compact disk (CD) compatible DVD player that has a growing popularity in the optical data storage market

Keywords

masks; micromachining; micromechanical devices; mirrors; optical disc storage; optical elements; 25 ns; ASM; DVD player; annular shutter mirror; compact disk; digital video disk; effective beam spot size; electrostatic force; eye pattern; jitter; micromachined annular shutter mirror; optical data storage; pick-up module; readout signal; surface micromachining; three masks process; Apertures; CD recording; DVD; Electrostatics; Fabrication; Force control; Jitter; Micromachining; Mirrors; Size control;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659802

Filename

659802