Title :
Quasi-2D COM model for diffraction calculation in slanted finger SAW devices
Author :
Chilla, E. ; Steiner, B. ; Grünwald, R. ; Osetrov, A.V. ; Hodkin, A.G. ; Jaffer, A.
Author_Institution :
Vectron Int., Teltow
Abstract :
SAW devices containing slanted finger interdigital transducers (SFITs) show an inhomogeneous acoustic wave field in two directions, i.e. parallel as well as perpendicular with respect to the primary wave propagation direction. Commonly, SFITs are simulated by using one-dimensional coupling-of-modes (COM) theory. However, diffraction as well as refraction may significantly influence the device performance, hence, the calculation of the acoustic wave field becomes essential for accurate device modelling. In this paper we describe a quasi-2D (Q2D) COM approach for SAW diffraction calculation and demonstrate the calculation accuracy for a highly diffractive device produced on 112X-LiTaO3.
Keywords :
acoustic wave diffraction; acoustic wave refraction; interdigital transducers; surface acoustic wave devices; acoustic wave diffraction; acoustic wave refraction; coupling-of-modes theory; inhomogeneous acoustic wave field; primary wave propagation direction; quasi-2D COM model; slanted finger SAW devices; slanted finger interdigital transducers; Acoustic devices; Acoustic diffraction; Acoustic propagation; Acoustic refraction; Acoustic transducers; Acoustic waves; Filters; Fingers; Surface acoustic wave devices; Surface acoustic waves; COM theory; Diffraction; SAW; SFIT devices;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0194
