Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications

Author

Zhu, B.P. ; Wu, D.W. ; Zhou, Q.F. ; Shung, K.K.

Author_Institution

Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

70

Lastpage

73

Abstract

Piezoelectric Pb(Zr_0.52Ti_0.48)O₃ thick film with the thickness around 10 mum has been deposited on the (111) Pt/Ti/SiO₂/Si substrate using a ceramic powder/sol-gel solution modified composite method. X-ray diffraction analysis and scanning electron microscope revealed that the film was in the well-crystallized perovskite phase and cracked free. At 1 KHz, The dielectric constant and the loss were 1925 and 0.015, respectively. The remnant polarization was 42.0 muC/cm² at room temperature. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 50% at 156 MHz.

Keywords

X-ray diffraction; biomedical transducers; biomedical ultrasonics; dielectric losses; dielectric polarisation; lead compounds; permittivity; piezoelectric thin films; piezoelectric transducers; scanning electron microscopy; sol-gel processing; thin film devices; ultrasonic transducers; PZT; Pt-Ti-SiO₂-Si; Si; X-ray diffraction analysis; ceramic powder method; clinical imaging; crystallized perovskite phase; dielectric constant; dielectric loss; dielectric polarization; electrical property; frequency 1 kHz; frequency 156 MHz; high frequency transducer applications; lead zirconate titanate thick film; piezoelectric thick film; scanning electron microscope; single element ultrasonic transducer; sol-gel solution modified composite method; temperature 293 K to 298 K; Ceramics; Dielectric substrates; Electrons; Frequency; Lead; Piezoelectric transducers; Powders; Thick films; Titanium compounds; X-ray diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0018

Filename

4803557