Title :
Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications
Author :
Zhu, B.P. ; Wu, D.W. ; Zhou, Q.F. ; Shung, K.K.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA
Abstract :
Piezoelectric Pb(Zr0.52Ti0.48)O3 thick film with the thickness around 10 mum has been deposited on the (111) Pt/Ti/SiO2/Si substrate using a ceramic powder/sol-gel solution modified composite method. X-ray diffraction analysis and scanning electron microscope revealed that the film was in the well-crystallized perovskite phase and cracked free. At 1 KHz, The dielectric constant and the loss were 1925 and 0.015, respectively. The remnant polarization was 42.0 muC/cm2 at room temperature. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 50% at 156 MHz.
Keywords :
X-ray diffraction; biomedical transducers; biomedical ultrasonics; dielectric losses; dielectric polarisation; lead compounds; permittivity; piezoelectric thin films; piezoelectric transducers; scanning electron microscopy; sol-gel processing; thin film devices; ultrasonic transducers; PZT; Pt-Ti-SiO2-Si; Si; X-ray diffraction analysis; ceramic powder method; clinical imaging; crystallized perovskite phase; dielectric constant; dielectric loss; dielectric polarization; electrical property; frequency 1 kHz; frequency 156 MHz; high frequency transducer applications; lead zirconate titanate thick film; piezoelectric thick film; scanning electron microscope; single element ultrasonic transducer; sol-gel solution modified composite method; temperature 293 K to 298 K; Ceramics; Dielectric substrates; Electrons; Frequency; Lead; Piezoelectric transducers; Powders; Thick films; Titanium compounds; X-ray diffraction;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0018
