• DocumentCode
    3025334
  • Title

    A Microfluidic Device with Embedded Capacitive Sensor for Fluid Discrimination and Characterization

  • Author

    Demori, Marco ; Ferrari, Vittorio ; Poesio, Pietro ; Strazza, Domenico

  • Author_Institution
    Dipt. di Ing. dell´´Inf., Univ. degli studi di Brescia, Brescia, Italy
  • fYear
    2010
  • fDate
    18-25 July 2010
  • Firstpage
    253
  • Lastpage
    257
  • Abstract
    This paper describes the development of a microfluidic device with embedded capacitive sensing that allows the discrimination of fluids on the basis of the dielectric permittivity. The device is fabricated in a hybrid technology, which innovatively combines PDMS (PolyDiMethylSiloxane) soft photolithography and screen printing techniques. A microchannel, realized in a PDMS layer, is placed in the fringe field of a sensing capacitor formed by electrodes screen-printed on a glass substrate. Fluids inside the microchannel affect the capacitance that is measured by a tailored electronic interface system. Experimental results are reported demonstrating the capability of the system to discriminate different fluids and estimate their dielectric permittivity.
  • Keywords
    capacitance measurement; capacitive sensors; flow measurement; flow sensors; intelligent sensors; microchannel flow; microelectrodes; microfabrication; permittivity; photolithography; polymers; PDMS layer; capacitance measurement; dielectric permittivity; electrode; embedded capacitive sensor; fluid characterization; fluid discrimination; microchannel; microfluidic device; polydimethylsiloxane; screen printing; soft photolithography; tailored electronic interface system; Capacitance; Dielectric measurements; Fluids; Microchannel; Microfluidics; Permittivity; Sensors; PDMS; capacitive sensing; fluid discrimination; microfluidic devices; screen-printing technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensor Device Technologies and Applications (SENSORDEVICES), 2010 First International Conference on
  • Conference_Location
    Venice
  • Print_ISBN
    978-1-4244-7474-5
  • Type

    conf

  • DOI
    10.1109/SENSORDEVICES.2010.55
  • Filename
    5632175