Fabrication of Single Crystal Silicon Nanowire Bridge

This paper presents the fabrication method of single crystal silicon nanowire, which is easy to control the size and position of nanowire. Therefore it can be used in various sensors like a pressure sensor, a tactile sensor and a microphone. Spacer, which is created by two cycles of Deposition & Etch process, is used as the dry etch mask, and beyond 100 nm nanowire bridges are fabricated. This paper provides the easy way to make sensors using good piezoresistivity of single crystal silicon nanowire. The resistance of nanowire measured as 4.5 MΩ.