Title :
Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution
Author :
Sinno, A. ; Ruaux, P. ; Chassagne, L. ; Topcu, S. ; Alalyli, Y. ; Lerondel, G. ; Blaize, S. ; Bruyant, A. ; Royer, P.
Author_Institution :
LISV, PRES Univ. of Versailles, Versailles, France
Abstract :
We developed a home-made Sample-Holder Unit used for 2D nano-positionning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.
Keywords :
atomic force microscopy; image resolution; nanopositioning; near-field scanning optical microscopy; optical images; piezoelectric actuators; sample holders; 2D nanopositionning; atomic force microscope; enlarged sample holder; home-made sample-holder unit; millimeter scale optical images; millimeter scanning; near-field microscopy; optical AFM imaging; optical imaging; piezoelectric actuator; Actuators; Image resolution; Microscopy; Mirrors; Optical imaging; Optical microscopy; Optical waveguides; Nanometrology - Optical Imaging -Nanodisplacement - AFM/SNOM;
Conference_Titel :
Sensor Device Technologies and Applications (SENSORDEVICES), 2010 First International Conference on
Conference_Location :
Venice
Print_ISBN :
978-1-4244-7474-5
DOI :
10.1109/SENSORDEVICES.2010.42
