• DocumentCode
    3026471
  • Title

    Lifetime mapping of Si wafers by an infrared camera [for solar cell production]

  • Author

    Bail, Michael ; Kentsch, Jörg ; Brendel, Rolf ; Schulz, Max

  • Author_Institution
    ZAE Bayern, Erlangen, Germany
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    99
  • Lastpage
    103
  • Abstract
    The authors present a fast and contact-free method to map the effective minority carrier lifetime τeff of silicon solar cell wafers at a high spatial resolution. An infrared camera measures the infrared light absorbtion induced by optically excited free carriers. A single camera measurement yields a map of the areal density of excess minority carriers which the authors convert into a map of the effective minority carrier lifetime τeff. The infrared measurement results agree with the results of established techniques, such as microwave detected photoconductance decay and quasi steady state photoconductance lifetime measurements. The novel infrared lifetime mapping technique is sufficiently fast for in-line process control
  • Keywords
    carrier density; carrier lifetime; elemental semiconductors; infrared imaging; light absorption; minority carriers; optical variables measurement; semiconductor device measurement; semiconductor device testing; silicon; solar cells; Si; Si solar cell wafers; effective minority carrier lifetime; excess minority carrier density; high spatial resolution; in-line process control; infrared lifetime mapping technique; infrared light absorbtion measurement; optically excited free carriers; solar cell production; Area measurement; Cameras; Charge carrier lifetime; Density measurement; Infrared detectors; Microwave measurements; Photoconductivity; Photovoltaic cells; Silicon; Spatial resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE
  • Conference_Location
    Anchorage, AK
  • ISSN
    0160-8371
  • Print_ISBN
    0-7803-5772-8
  • Type

    conf

  • DOI
    10.1109/PVSC.2000.915763
  • Filename
    915763