Title :
Silicon solar cell process monitoring by PV-reflectometer
Author :
Sopori, Bhushan ; Zhang, Yi ; Chen, Wei ; Madjdpour, Jamal
Author_Institution :
Nat. Renewable Energy Lab., Golden, CO, USA
Abstract :
A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar cell fabrication processes, including sawing, texturing, AR coating, and front and back metallization
Keywords :
antireflection coatings; elemental semiconductors; metallisation; photodetectors; process control; process monitoring; reflectometers; semiconductor device manufacture; silicon; solar cells; AR coating; PV-reflectometer; Si; Si solar cell fabrication processes; back metallization; front metallization; process control; sawing; silicon solar cell process monitoring; texturing; Coatings; Electrical equipment industry; Fabrication; Industrial control; Instruments; Monitoring; Photovoltaic cells; Process control; Sawing; Silicon;
Conference_Titel :
Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE
Conference_Location :
Anchorage, AK
Print_ISBN :
0-7803-5772-8
DOI :
10.1109/PVSC.2000.915769
