DocumentCode
3026594
Title
Silicon solar cell process monitoring by PV-reflectometer
Author
Sopori, Bhushan ; Zhang, Yi ; Chen, Wei ; Madjdpour, Jamal
Author_Institution
Nat. Renewable Energy Lab., Golden, CO, USA
fYear
2000
fDate
2000
Firstpage
120
Lastpage
123
Abstract
A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar cell fabrication processes, including sawing, texturing, AR coating, and front and back metallization
Keywords
antireflection coatings; elemental semiconductors; metallisation; photodetectors; process control; process monitoring; reflectometers; semiconductor device manufacture; silicon; solar cells; AR coating; PV-reflectometer; Si; Si solar cell fabrication processes; back metallization; front metallization; process control; sawing; silicon solar cell process monitoring; texturing; Coatings; Electrical equipment industry; Fabrication; Industrial control; Instruments; Monitoring; Photovoltaic cells; Process control; Sawing; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE
Conference_Location
Anchorage, AK
ISSN
0160-8371
Print_ISBN
0-7803-5772-8
Type
conf
DOI
10.1109/PVSC.2000.915769
Filename
915769
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