Title :
Unique properties of HBAR characteristics
Author :
Mansfeld, G.D. ; Alekseev, S.G. ; Polzikova, N.I.
Author_Institution :
Inst. of Radioengineering & Electron. RAS, Moscow
Abstract :
It is rigorously shown that the data of the measurements of the difference between frequencies of resonance and antiresonance on high harmonic of HBAR together with the measurement of the frequencies between peculiarities of the phase of the electromagnetic wave reflection coefficient give a simple ways of the measurements of the losses in the materials composing HBAR and evaluation of the electromechanical constant of the piezoelectric film exciting acoustic waves in the HBAR.
Keywords :
Q-factor; acoustic resonators; bulk acoustic wave devices; electromagnetic wave reflection; piezoelectric thin films; HBAR characteristics; bulk acoustic wave resonator; electromagnetic wave reflection coefficient; electromechanical coupling coefficient; piezoelectric film; quality factor; resonance frequency; Acoustic materials; Acoustic measurements; Electromagnetic measurements; Electromagnetic reflection; Frequency measurement; Loss measurement; Phase measurement; Piezoelectric materials; Resonance; Resonant frequency; attenuation; electromechanical coupling coefficient; impedance; quality factor; resonance;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0107
