Title :
Three-axis micro-force sensor with tunable force range and sub-micronewton measurement uncertainty
Author :
Muntwyler, S. ; Beyeler, F. ; Nelson, B.J.
Author_Institution :
ETH Zurich, Zurich, Switzerland
Abstract :
This paper presents the design, fabrication and characterization of the first microfabricated three-axis tunable force sensor with sub-micronewton measurement uncertainty. The sensing range can be electrically tuned from +/-20 μN to +/-200 μN while taking measurements, ensuring optimal sensor characteristics for a large variety of applications. Since the sensor has been pre-calibrated for the entire tuning range the exact sensor gain and its uncertainty is known. Real-time, three degree of freedom force feedback makes this sensor a valuable tool for micromanipulation.
Keywords :
force control; force feedback; force sensors; micromanipulators; microsensors; force feedback; micro-force sensor; micromanipulation; sub-micronewton measurement uncertainty; tunable force range; Atomic force microscopy; Calibration; Capacitors; Fabrication; Force measurement; Force sensors; Measurement uncertainty; Mechanical variables measurement; Probes; Sensor phenomena and characterization;
Conference_Titel :
Robotics and Automation (ICRA), 2010 IEEE International Conference on
Conference_Location :
Anchorage, AK
Print_ISBN :
978-1-4244-5038-1
Electronic_ISBN :
1050-4729
DOI :
10.1109/ROBOT.2010.5509852