Title :
Capacitive micro-sensor for the detection of dextrose
Author :
Humayun, Q. ; Hashim, U. ; Kashif, Mhair
Author_Institution :
Nano Struct. Lab.-On-Chip Res. Group, Univ. Malaysia Perlis (UniMap), Kangar, Malaysia
Abstract :
This work demonstrates the fabrication and electrical characterization of aluminum micro-gap on silicon substrate. For low cost and time conventional photolithography technique has been applied to fabricate the aluminum micro-gap. The fabricated device was tested for different molarities of dextrose. For the micro-gap fabrication chrome mask was design using AutoCAD software. The size of the fabricated micro-gap was around 81.7μm. The electrical measurements were carried out using Alpha high frequency dielectric analyzer. It was observed that when the dextrose concentration varied from 250μM to 1μM the capacitance value fluctuates from 330nF to 10nF. The limit of detection for the fabricated device was 1μM.
Keywords :
CAD; aluminium; capacitive sensors; electronic engineering computing; elemental semiconductors; masks; microsensors; photolithography; silicon; Al; Alpha high frequency dielectric analyzer; AutoCAD software; Si; capacitance 330 nF to 10 nF; capacitive microsensor; dextrose concentration; electrical measurements; microgap fabrication chrome mask; photolithography technique; Aluminum; Capacitance; Fabrication; Lithography; Sensor phenomena and characterization; Silicon; capacitance; chrome mask; dextrose; micro-gap; molarities;
Conference_Titel :
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4673-2395-6
Electronic_ISBN :
978-1-4673-2394-9
DOI :
10.1109/SMElec.2012.6417243