Capacitive micro-sensor for the detection of dextrose

This work demonstrates the fabrication and electrical characterization of aluminum micro-gap on silicon substrate. For low cost and time conventional photolithography technique has been applied to fabricate the aluminum micro-gap. The fabricated device was tested for different molarities of dextrose. For the micro-gap fabrication chrome mask was design using AutoCAD software. The size of the fabricated micro-gap was around 81.7μm. The electrical measurements were carried out using Alpha high frequency dielectric analyzer. It was observed that when the dextrose concentration varied from 250μM to 1μM the capacitance value fluctuates from 330nF to 10nF. The limit of detection for the fabricated device was 1μM.