Title :
Refractive Gauss-to-Tophat Beam Shapers Improve Structure Quality and Speed in Micro-machining
Author :
Homburg, Oliver ; Toennissen, Frank ; Ganser, Heiko ; Mitra, Thomas ; Lissotschenko, Vitalij
Author_Institution :
LIMO-Lissotschenko Mikrooptik GmbH, Dortmund
Abstract :
The transformation principle of a Gaussian beam into a homogeneous top-hat profile by means of free-form refractive micro-optics is reviewed. Various flat-top profiles achieved with different laser sources as well as micro-machining results are demonstrated.
Keywords :
laser beam machining; micro-optics; micromachining; flat-top profiles; free-form refractive micro-optics; laser sources; micromachining; refractive Gauss-to-Tophat beam shapers; speed improvement; structure quality; Gaussian processes; Laser beams; Laser modes; Optical design; Optical device fabrication; Optical devices; Optical refraction; Power lasers; Production; Resists;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453726
