DocumentCode
3026833
Title
Evaluating Micromachining Capabilities of High Power Diode Pumped Solid State Mode-locked and Q-switched Ultraviolet Laser
Author
Patel, Rajesh S. ; Bovatsek, Jim
Author_Institution
Spectra Phys., Mountain View
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
The micromachining capabilities of two newly developed DPSS mode-locked and q-switched UV lasers have been evaluated by studying ablation of commonly used materials in semiconductor, microelectronics, and solar cell industry.
Keywords
laser mode locking; micromachining; optical fabrication; semiconductor lasers; solid lasers; high power diode pumped solid state mode-locked laser; microelectronics industry; micromachining capabilities; q-switched ultraviolet laser; semiconductor industry; solar cell industry; Diodes; Laser ablation; Laser excitation; Laser mode locking; Micromachining; Power lasers; Pump lasers; Semiconductor lasers; Solid lasers; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453729
Filename
4453729
Link To Document