Title :
Precision Resistor Laser Trimming for Analog Microelectronics
Author :
Meunier, Michel ; Gagnon, Yves ; Lacourse, Alain ; Ducharme, Mathieu ; Rioux, Simon ; Savaria, Yvon
Author_Institution :
Laser Process. Lab., Montreal
Abstract :
A fast, low cost laser trimming technique of highly accurate resistor has been developed for analogue microelectronics. Modelling of the technique is described and an example of tuning a reference voltage circuit is given.
Keywords :
CMOS analogue integrated circuits; circuit tuning; laser beam machining; precision engineering; reference circuits; resistors; CMOS process; analog microelectronics; precision resistor laser trimming; reference voltage circuit tuning; Circuits; Laser modes; Laser theory; Laser tuning; Microelectronics; Optical device fabrication; Resistors; Semiconductor lasers; Silicon; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453738
