Title :
Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing
Author :
Darscht, Maxim Ya ; Miklyaev, Yuri V. ; Mikhailov, Alexei V. ; Lissotschenko, Vitalij N.
Author_Institution :
LIMO GmbH Bookenburgweg, Dortmund
Abstract :
A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the line-shaped laser intensity distribution for scanning annealing.
Keywords :
laser beam annealing; laser beams; optical focusing; solid lasers; asymmetrical M2 value; beam shaping system; depth of focus; laser homogeneity; laser parameters characterization; line scanning laser annealing; line-shaped laser intensity distribution; solid state laser beam shaping; Annealing; Glass; Laser beams; Laser sintering; Laser stability; Optical design; Optical films; Optical pulses; Solid lasers; Spatial coherence;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453739
