• DocumentCode
    3027058
  • Title

    Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing

  • Author

    Darscht, Maxim Ya ; Miklyaev, Yuri V. ; Mikhailov, Alexei V. ; Lissotschenko, Vitalij N.

  • Author_Institution
    LIMO GmbH Bookenburgweg, Dortmund
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the line-shaped laser intensity distribution for scanning annealing.
  • Keywords
    laser beam annealing; laser beams; optical focusing; solid lasers; asymmetrical M2 value; beam shaping system; depth of focus; laser homogeneity; laser parameters characterization; line scanning laser annealing; line-shaped laser intensity distribution; solid state laser beam shaping; Annealing; Glass; Laser beams; Laser sintering; Laser stability; Optical design; Optical films; Optical pulses; Solid lasers; Spatial coherence;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4453739
  • Filename
    4453739
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3027058