DocumentCode
3027160
Title
MBE grown dislocation-free antimonides on GaAs compliant universal substrates
Author
Ejeckam, F.E. ; Seaford, M.L. ; Zhu, Z.H. ; Eyink, K.G. ; Tomich, D.H. ; Hou, H.Q. ; Hammons, B.E. ; Lo, Y.H.
Author_Institution
Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA
fYear
1997
fDate
11-15 May 1997
Firstpage
452
Lastpage
454
Abstract
In this work, we demonstrate the growth of a 6500 Å, dislocation-free, InSb layer (~14.7% compressively lattice mismatched to GaAs) on a compliant universal (CU) GaAs substrate. Using a recently proposed technology, twist wafer-bonding, the authors use a new type of III-V substrate on which almost any type of semiconductor may be grown without dislocations. The CU GaAs substrate was formed by wafer-bonding a 30 Å GaAs layer to a bulk GaAs crystal with a large angular misalignment inserted about their common (100) direction. Cross-sectional bright-field TEM images of the InSb show no dislocations in all of the observed areas (~2.6 μm wide in one contiguous region). Electron diffraction measurements made of the films showed the twist wafer-bonding technology to be promising for even higher lattice-mismatches
Keywords
III-V semiconductors; electron diffraction; indium compounds; molecular beam epitaxial growth; semiconductor growth; transmission electron microscopy; wafer bonding; 30 angstrom; 6500 angstrom; GaAs; GaAs compliant universal substrates; InSb; angular misalignment; compressive lattice mismatch; cross-sectional bright-field TEM images; dislocation-free InSb layer; dislocation-free MBE growth; electron diffraction measurements; twist wafer-bonding; Computer aided analysis; Electrons; Etching; Gallium arsenide; Laboratories; Lattices; Molecular beam epitaxial growth; Semiconductor materials; Substrates; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1997., International Conference on
Conference_Location
Cape Cod, MA
ISSN
1092-8669
Print_ISBN
0-7803-3898-7
Type
conf
DOI
10.1109/ICIPRM.1997.600191
Filename
600191
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