• DocumentCode
    3027160
  • Title

    MBE grown dislocation-free antimonides on GaAs compliant universal substrates

  • Author

    Ejeckam, F.E. ; Seaford, M.L. ; Zhu, Z.H. ; Eyink, K.G. ; Tomich, D.H. ; Hou, H.Q. ; Hammons, B.E. ; Lo, Y.H.

  • Author_Institution
    Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA
  • fYear
    1997
  • fDate
    11-15 May 1997
  • Firstpage
    452
  • Lastpage
    454
  • Abstract
    In this work, we demonstrate the growth of a 6500 Å, dislocation-free, InSb layer (~14.7% compressively lattice mismatched to GaAs) on a compliant universal (CU) GaAs substrate. Using a recently proposed technology, twist wafer-bonding, the authors use a new type of III-V substrate on which almost any type of semiconductor may be grown without dislocations. The CU GaAs substrate was formed by wafer-bonding a 30 Å GaAs layer to a bulk GaAs crystal with a large angular misalignment inserted about their common (100) direction. Cross-sectional bright-field TEM images of the InSb show no dislocations in all of the observed areas (~2.6 μm wide in one contiguous region). Electron diffraction measurements made of the films showed the twist wafer-bonding technology to be promising for even higher lattice-mismatches
  • Keywords
    III-V semiconductors; electron diffraction; indium compounds; molecular beam epitaxial growth; semiconductor growth; transmission electron microscopy; wafer bonding; 30 angstrom; 6500 angstrom; GaAs; GaAs compliant universal substrates; InSb; angular misalignment; compressive lattice mismatch; cross-sectional bright-field TEM images; dislocation-free InSb layer; dislocation-free MBE growth; electron diffraction measurements; twist wafer-bonding; Computer aided analysis; Electrons; Etching; Gallium arsenide; Laboratories; Lattices; Molecular beam epitaxial growth; Semiconductor materials; Substrates; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1997., International Conference on
  • Conference_Location
    Cape Cod, MA
  • ISSN
    1092-8669
  • Print_ISBN
    0-7803-3898-7
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1997.600191
  • Filename
    600191