Title :
The Impact of Ultrashort Femtosecond Pulse-Shaping Technology for Micromachining
Author_Institution :
Michigan State Univ., East Lansing
Abstract :
Ultrashort laser pulses improve micromachining but they suffer significant phase distortions when focused by microscope objectives. Breakthrough technology to correct high order phase distortions is used to improve the machining characteristics of metals and semiconductors.
Keywords :
laser materials processing; micromachining; micromachining; phase distortions; ultrashort femtosecond pulse-shaping technology; Chemical lasers; Laser noise; Laser theory; Micromachining; Optical harmonic generation; Optical pulse shaping; Optical pulses; Semiconductor lasers; Surface emitting lasers; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453749
