Title :
Advanced femtosecond lasers in Manufacturing
Author :
Sekita, Hitoshi ; Imahoko, Tomohiro ; Takasago, Kazuya ; Kamata, Masanao ; Tsujikawa, Susumu ; Sumiyoshi, Tetsumi
Author_Institution :
Cyber Laser Inc., Tokyo
Abstract :
We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory.
Keywords :
high-speed optical techniques; laser beam applications; laser stability; liquid crystal displays; semiconductor device manufacture; LCD manufacturing factory; advanced femtosecond lasers; commercial market; femtosecond lasers stability; semiconductor manufacturing factory; DNA; Manufacturing; Model driven engineering; Optical wavelength conversion;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453751
