• DocumentCode
    3027292
  • Title

    Advanced femtosecond lasers in Manufacturing

  • Author

    Sekita, Hitoshi ; Imahoko, Tomohiro ; Takasago, Kazuya ; Kamata, Masanao ; Tsujikawa, Susumu ; Sumiyoshi, Tetsumi

  • Author_Institution
    Cyber Laser Inc., Tokyo
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory.
  • Keywords
    high-speed optical techniques; laser beam applications; laser stability; liquid crystal displays; semiconductor device manufacture; LCD manufacturing factory; advanced femtosecond lasers; commercial market; femtosecond lasers stability; semiconductor manufacturing factory; DNA; Manufacturing; Model driven engineering; Optical wavelength conversion;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4453751
  • Filename
    4453751
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3027292