Accurate modeling of capacitive micromachined ultrasonic transducers in pulse-echo operation

Author

Balantekin, Mujdat ; Degertekin, F. Levent

Author_Institution

Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

2107

Lastpage

2110

Abstract

We present a large-signal model of capacitive micromachined ultrasonic transducers (CMUTs). This model combined with transmit-receive electronics is implemented in an electrical circuit simulator. We investigate optimum biasing scheme to increase output pressure and the amount of nonlinearity generated in transmit. Comparison to experiments shows that the model can be used to estimate the performance of CMUTs in pulse-echo operation.

Keywords

biomedical transducers; biomedical ultrasonics; blood flow measurement; capacitive sensors; microsensors; ultrasonic transducer arrays; CMUT modeling; capacitive micromachined ultrasonic transducers; electrical circuit simulator; large signal model; nonlinearity generation; optimum biasing scheme; output pressure; pulse echo CMUT operation; transmit-receive electronics; Biomembranes; Circuit simulation; Electrostatics; Impedance; Mechanical engineering; Pulse amplifiers; Switches; Ultrasonic imaging; Ultrasonic transducers; Voltage; Capacitive Micromachined Ultrasonic Trransducers; Large-signal Modeling; Pulse-echo Simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0521

Filename

4803685