Conductometric sensor based on nanostructured titanium oxide thin film deposited on polyimide substrate with dissimilar metallic electrodes

Author

Zhang, C. ; Sadek, A.Z. ; Breedon, M. ; Ippolito, S.J. ; Wlodarski, W. ; Truman, T. ; Kalantar-zadeh, K.

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, VIC

fYear

2008

fDate

25-29 Feb. 2008

Firstpage

94

Lastpage

96

Abstract

A conductometric sensor was fabricated on flexible polyimide substrate with using interdigital transducer (IDT) formed by periodic Au and Cr tracks and coated with a TiO₂ nanostructured sensitive layer. Thin films of TiO₂ were deposited using the radio frequency (RF) magnetron sputtering method. Atomic force microscope (AFM) and scanning electron microscope (SEM) techniques were employed for the characterization of thin films. The sensor was tested towards humidity changes at room temperature.

Keywords

atomic force microscopy; nanostructured materials; scanning electron microscopy; sputtering; thin film sensors; titanium compounds; TiO₂; atomic force microscopy; conductometric sensor; nanostructured titanium oxide thin film; radio frequency magnetron sputtering method; scanning electron microscopy; Atomic force microscopy; Electrodes; Magnetic sensors; Polyimides; Radio frequency; Scanning electron microscopy; Sputtering; Substrates; Thin film sensors; Titanium; TiO2; flexible substrate; moisture sensing; polyimide;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoscience and Nanotechnology, 2008. ICONN 2008. International Conference on

Conference_Location

Melbourne, Vic.

Print_ISBN

978-1-4244-1503-8

Electronic_ISBN

978-1-4244-1504-5

Type

conf

DOI

10.1109/ICONN.2008.4639254

Filename

4639254