A new measurement system of sub-nanometer level based on single-frequency laser interferometer

In order to improve the measuring accuracy of laser interferometer to the sub-nanometer level, this paper describes a data acquisition procedures for laser interferometer programmed by C sharp, and the program has the functions of displaying, storing and resetting for the gathered data. Using the compensation algorithm of environmental air refractive index provided by RENISHAW Corporation to compensate the gathered data, the data can be more accurate. Experiment results showed that the sub-nanometer measurement system based on laser interferometer can meet the goals of this research because of its reliable performances, high accuracy and perfect functions on data measure. The effectiveness of sub-nanometer measure system has been proved by a lot of experiments.