A high resolution on-chip beat frequency detection system for measuring BTI, HCI, and TDDB

We present an on-chip reliability monitor capable of separating the aging effects of Hot Carrier Injection (HCI), Bias Temperature Instability (BTI), and Time Dependent Dielectric Breakdown (TDDB) with high frequency resolution. Sub-μs measurements are controlled by on-chip logic in order to avoid excessive unwanted BTI recovery during stress interruptions. Frequency shift measurement resolution of down to the error floor of 0.07% is achieved during these short interruptions using a beat frequency detection system, and we automate the experiments through a simple digital interface. Measurement results are presented from a 65 nm test chip.