Title :
Performance Comparison and Fabrication of Micro Machined Electron Tunneling Accelerometers having Cantilever and Proof-Mass Structures
Author :
Chaudhuri, Ashesh Ray ; Kundu, Pijus ; Chakraborty, Subha ; Bhattacharyya, T.K.
Author_Institution :
Adv. Technol. Dev. Centre, Indian Inst. of Technol., Kharagpur, India
Abstract :
This paper evaluates the performance characteristics of two tunneling accelerometers having cantilever and proof mass moving structures of similar dynamic response ranges. Design and optimization of the two structures have been carried out aiming aerospace and satellite application. Both the structures have been fabricated using surface micromachining process. Different performance parameters of the two structures have been analyzed through behavioral modeling and finite element method based simulation.
Keywords :
accelerometers; cantilevers; finite element analysis; micromachining; microsensors; optimisation; tunnelling; aerospace application; cantilever; finite element method based simulation; micromachined electron tunneling accelerometers; optimization; proof mass moving structures; satellite application; surface micromachining process; Accelerometers; Aerodynamics; Design optimization; Dynamic range; Electrons; Fabrication; Micromachining; Performance analysis; Satellites; Tunneling; MEMS; cantilever; proof-mass; tunneling accelerometer;
Conference_Titel :
Advances in Computing, Control, & Telecommunication Technologies, 2009. ACT '09. International Conference on
Conference_Location :
Trivandrum, Kerala
Print_ISBN :
978-1-4244-5321-4
Electronic_ISBN :
978-0-7695-3915-7
DOI :
10.1109/ACT.2009.61
